Zr-C thin films prepared by reactive RF magnetron sputtering.
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چکیده
منابع مشابه
Characterization of PZT Ferroelectric Thin Films by RF-magnetron Sputtering
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ژورنال
عنوان ژورنال: SHINKU
سال: 1989
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.32.323